This is a compatibility issue with 16-bit LUT profiling and the M1 chipset.
Please select Matrix in Profile Type to calibrate again or upgrade the PME software to v1.3.16 or later to fix this issue.
Note: we have removed the 16-bit LUT option after PME v1.3.16 to have better compatibility with more operating systems and reduce errors and calibration problems for BenQ monitors.